Lv11
68 积分 2022-10-08 加入
Low-temperature, high-growth-rate ALD of SiO2 using aminodisilane precursor
2小时前
待确认
Enhanced selectivity of atomic layer deposited Ru thin films through the discrete feeding of aminosilane inhibitor molecules
2小时前
待确认
Unlocking Ferroelectricity in Scalable AlBN Films via Plasma‐Enhanced Atomic Layer Deposition
26天前
已完结
Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
3个月前
已完结
Low-Temperature Self-Limiting Growth of Cubic Boron Nitride Via Hollow-Cathode Plasma-Enhanced Atomic Layer Deposition
3个月前
已关闭
High-pure AlN crystalline thin films deposited on GaN at low temperature by plasma-enhanced ALD
4个月前
已完结
Effect of nitrogen plasma on the mechanical and electrical properties of plasma-enhanced atomic layer deposited TiN films
4个月前
已完结
Low-energy ion irradiation effects on chlorine desorption in plasma-enhanced atomic layer deposition (PEALD) for silicon nitride
5个月前
已完结
Improved electrical contact property of Si-doped GaN thin films deposited by PEALD with various growth cycle ratio of SiNx and GaN
5个月前
已完结
Growth studies and characterization of silicon nitride thin films deposited by alternating exposures to Si2Cl6 and NH3
5个月前
已完结
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