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56 积分 2022-10-08 加入
Tuning the piezoelectric and mechanical properties of the AlN system via alloying with YN and BN
1小时前
待确认
Structural, Surface, and Optical Properties of AlN Thin Films Grown on Different Substrates by PEALD
1个月前
已完结
PEALD-Grown Crystalline AlN Films on Si (100) with Sharp Interface and Good Uniformity
1个月前
已完结
Low-temperature, high-growth-rate ALD of SiO2 using aminodisilane precursor
1个月前
已完结
Enhanced selectivity of atomic layer deposited Ru thin films through the discrete feeding of aminosilane inhibitor molecules
1个月前
已完结
Unlocking Ferroelectricity in Scalable AlBN Films via Plasma‐Enhanced Atomic Layer Deposition
2个月前
已完结
Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
4个月前
已完结
Low-Temperature Self-Limiting Growth of Cubic Boron Nitride Via Hollow-Cathode Plasma-Enhanced Atomic Layer Deposition
5个月前
已关闭
High-pure AlN crystalline thin films deposited on GaN at low temperature by plasma-enhanced ALD
5个月前
已完结
Effect of nitrogen plasma on the mechanical and electrical properties of plasma-enhanced atomic layer deposited TiN films
6个月前
已完结
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