Lv5
1420 积分 2022-08-31 加入
Suppression of Stress-Induced Defects in FinFET by Implantation and STI Co-Optimization
2个月前
已完结
Ultra low p-type SiGe contact resistance FinFETs with Ti silicide liner using cryogenic contact implantation amorphization and Solid-Phase Epitaxial Regrowth (SPER)
2个月前
已完结
LWR Improvement in the Advanced Process Node Involved in 193nm Photoresist Treatment
3个月前
已完结
Effects of implant temperature on process characteristics of low energy boron implanted silicon
3个月前
已完结
Sheet Resistance Dependence on Ion Angle Deviation
4个月前
已完结
Dose matching at high tilt angle by off-axis implantation
5个月前
已完结
Simulation and fabrication of vertical channel transistors with self-aligned high- κ metal gates using ion implantation for source/drain doping
5个月前
已完结
Effect of ion flux (dose rate) in source-drain extension ion implantation for 10-nm node FinFET and beyond on 300/450mm platforms
5个月前
已完结
35 Years of challenge and innovation in ion implant
5个月前
已完结
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