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204 积分 2026-04-20 加入
Role of Oxygen in Amorphous Carbon Hard Mask Plasma Etching
1个月前
已完结
Effects of Mask and Necking Deformation on Bowing and Twisting in High-Aspect-Ratio Contact Hole Etching
1个月前
已完结
Process Optimization of Amorphous Carbon Hard Mask in Advanced 3D-NAND Flash Memory Applications
1个月前
已完结
Direct evaluation of the sp3 content in diamond-like-carbon films by XPS
1个月前
已完结
XPS and Laser Raman Analysis of Hydrogenated Amorphous Carbon Films
1个月前
已完结
Nanomechanical characterization of amorphous hydrogenated carbon thin films
1个月前
已完结
Raman spectroscopy of hydrogenated amorphous carbons
1个月前
已完结
Effect of Radio Frequency Power on the Properties of Hydrogenated Amorphous Carbon Films Grown by Radio Frequency Plasma-Enhanced Chemical Vapor Deposition
1个月前
已完结
Dry etch selectivity of a-C:H hardmasks for sub-65nm patterning applications
1个月前
已完结
Correlation of sp3 and sp2 fraction of carbon with electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon films
1个月前
已完结
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