Lv4
420 积分 2026-04-20 加入
Effect of ionic strength on amorphous carbon during chemical mechanical planarization
24天前
已完结
Investigation of the removal mechanism in amorphous carbon chemical mechanical polishing for achieving an atomic-scale roughness
24天前
已完结
Process Optimization of Amorphous Carbon Hard Mask in Advanced 3D-NAND Flash Memory Applications
24天前
已完结
Carbon Plug Application in 3D NAND Fabrication
24天前
已完结
Effect of Radio Frequency Power on the Properties of Hydrogenated Amorphous Carbon Films Grown by Radio Frequency Plasma-Enhanced Chemical Vapor Deposition
24天前
已完结
Preparation and analysis of amorphous carbon films deposited from (C6H12)/Ar/He chemistry for application as the dry etch hard mask in the semiconductor manufacturing process
24天前
已完结
Comparative study on the properties of amorphous carbon layers deposited from 1-hexene and propylene for dry etch hard mask application in semiconductor device manufacturing
24天前
已完结
Effects of nitrogen doping in amorphous carbon layers on the diffusion of fluorine atoms: A first-principles study
24天前
已完结
Silicon dioxide mask by plasma enhanced atomic layer deposition in focused ion beam lithography
24天前
已完结
Characterization of oxygen and nitrogen rapid thermal annealing processes for ultra-low-k SiCOH films
24天前
已完结
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