Lv11
90 积分 2024-03-01 加入
Spatial and frequency dependence of plasma currents in a 300 mm capacitively coupled plasma reactor
1小时前
待确认
Field reversal in low pressure, unmagnetized radio frequency capacitively coupled argon plasma discharges
5个月前
已完结
The Discharge Characteristics of Capacitively Coupled Ar Plasma as the Change of Pressure
5个月前
已完结
Power measurement analysis of moderate pressure capacitively coupled discharges
5个月前
已完结
Experimental diagnosis of electron density and temperature in capacitively coupled argon plasmas: Triple-frequency discharges and two-dimensional spatial distributions
5个月前
已完结
A harmonic study of electric field nonlinearity and field reversal in collisionless capacitive discharges driven by sawtooth-like waveforms
8个月前
已完结
Harmonic suppression and uniformity improvement of plasma density in capacitively coupled plasma
8个月前
已完结
Harmonic suppression and uniformity improvement of plasma density in capacitively coupled plasma
10个月前
已完结
Nonlinear transmission line (NTL) model study of electromagnetic effects in high-frequency asymmetrically driven capacitive discharges
10个月前
已完结
Radial spatiotemporal evolution of rf magnetic field and plasma current in a very-high-frequency plasma source over a wide range of plasma density and pressure
11个月前
已完结