Lv11
60 积分 2024-03-01 加入
Scale-invariant resonance characteristics in magnetized capacitive radio frequency plasmas
2小时前
已关闭
Features of Electromagnetic Field Excitation in a Capacitive HF Discharge. II. Symmetric Discharge Completely Filling Vacuum Chamber under Symmetric and Asymmetric Excitation
2小时前
已完结
Study on the third harmonic diagnosis and etching distribution analysis according to the phase change between the upper and lower RF electrodes in a 60 MHz capacitively coupled plasma triode reactor based high aspect ratio contact dry etching process
3小时前
已完结
Application of large language models in engineering education: A case study of system modeling and simulation courses
29天前
已完结
Spectral control in the liquid crystal tunable filters
1个月前
已完结
Effects of process parameters and chamber structure on plasma uniformity in a large-area capacitively coupled discharge
1个月前
已完结
Spatial and frequency dependence of plasma currents in a 300 mm capacitively coupled plasma reactor
1个月前
已完结
Field reversal in low pressure, unmagnetized radio frequency capacitively coupled argon plasma discharges
6个月前
已完结
The Discharge Characteristics of Capacitively Coupled Ar Plasma as the Change of Pressure
6个月前
已完结
Power measurement analysis of moderate pressure capacitively coupled discharges
6个月前
已完结
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