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Cobalt CMP Development for 7nm Logic Device
10小时前
已关闭
Electrochemical study on metal corrosion in chemical mechanical planarization process
22天前
已完结
In Situ Study of Mechanical-Electrochemical Interactions during Cobalt ECMP
1个月前
已完结
Effects of Electrochemical Mechanical Polishing on the Polishing Efficiency and Quality of Co with H2O2 and BTA under Alkaline Conditions
1个月前
已关闭
Multicomponent Protection at Metal/Oxide Interfaces: Electron-Atomic Scale Mechanism of TT-LYK Inhibitor in Cobalt Chemical Mechanical Polishing
1个月前
已完结
Effects of oxygen adsorption on the corrosion behavior of the Ti(0001) surface: a DFT investigation
1个月前
已完结
Revolutionizing Chemical Mechanical Polishing with Machine Learning: A Comprehensive Review of Challenges and Opportunities
2个月前
已完结
Unveiling Microscopic Mechanisms of Chemical Mechanical Polishing via Multi‐Scale Theoretical Calculations
2个月前
已完结
Online study of the plasma-accelerated aging process and toxicity of polyethylene terephthalate
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