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40 积分 2024-06-01 加入
Cracking study of pentakis(dimethylamino)tantalum vapors by Knudsen cell mass spectrometry
1个月前
已完结
Characterization of vapor draw vessel performance for low-volatility solid precursor delivery
1个月前
已完结
Experimental thermodynamics for the evaluation of ALD growth processes
1个月前
已完结
12.1 A 7nm 256Mb SRAM in high-k metal-gate FinFET technology with write-assist circuitry for low-V<inf>MIN</inf> applications
6个月前
已完结
Properties of ALD TaxNy films as a barrier to aluminum in work function metal stacks
7个月前
已完结
Investigation of TaN as the wet etch stop layer for HKMG-last integration in the 22 nm and beyond nodes CMOS technology
7个月前
已完结
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