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100 积分 2025-11-03 加入
Novel gap filling technique of shallow trench isolation structure in 16/14 nm FinFET using sub-atmospheric chemical vapor deposition
1天前
求助中
Modeling and Control of SiNx Film Growth using the Kinetic Monte Carlo Method: Impact of Gas Flow Rate on Surface Roughness and Film Thickness
22天前
已完结
Study on the etching mechanism of quartz using dual-frequency (60 MHz/400 KHz) capacitively coupled C4F8/Ar/O2 plasma
1个月前
已完结
Interaction between soot particles and during dielectric barrier discharge plasma remediation of simulated diesel exhaust
1个月前
已完结
Control of surface roughness during high-speed chemical dry thinning of silicon wafer
1个月前
已完结
Remote plasma etching of silicon nitride and silicon dioxide using NF3/O2 gas mixtures
1个月前
已完结
Kinetic Mechanism of Reactive Oxygen/Nitrogen Species in Plasma-Assisted Greenhouse Gas Replacement
2个月前
已完结
Positive self-bias in a magnetized CCP discharge
2个月前
已关闭
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