Lv3
210 积分 2022-07-03 加入
Plasma-enhanced atomic layer deposition of silicon nitride thin films with different substrate biasing using Diiodosilane precursor
23天前
已完结
Atomic layer deposition of super conformal copper seed layer for ultra-high aspect ratio through-silicon-vias
2个月前
已完结
Seedless electrodeposition of Cu thin films on ALD Ru diffusion barriers with different electrical properties
2个月前
已完结
In vacuo studies on reaction mechanisms in ALD processes of ruthenium and platinum films
3个月前
已关闭
Seedless electrodeposition of Cu thin films on ALD Ru diffusion barriers with different electrical properties
3个月前
已完结
Atomic layer deposition of Ru using a new zero-valent Ru precursor with a ligand system combining open and closed ligands
3个月前
已完结
Dimension Control of Platinum Nanostructures by Atomic Layer Deposition: From Surface Chemical Reactions to Applications
4个月前
已完结
Atomic layer growth of Pt films using dimethyl(N,N-dimethyl-3-butene-1-amine-N)platinum and O3
5个月前
已完结
High-quality SiNx thin-film growth at 300 °C using atomic layer deposition with hollow-cathode plasma
5个月前
已完结
Preparation of 100GHz DWDM filter by high power medium frequency pulse magnetron sputtering
5个月前
已完结
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