Lv3
212 积分 2022-07-03 加入
Atomic layer deposition of super conformal copper seed layer for ultra-high aspect ratio through-silicon-vias
22天前
已完结
Seedless electrodeposition of Cu thin films on ALD Ru diffusion barriers with different electrical properties
23天前
已完结
In vacuo studies on reaction mechanisms in ALD processes of ruthenium and platinum films
1个月前
已关闭
Seedless electrodeposition of Cu thin films on ALD Ru diffusion barriers with different electrical properties
1个月前
已完结
Atomic layer deposition of Ru using a new zero-valent Ru precursor with a ligand system combining open and closed ligands
1个月前
已完结
Dimension Control of Platinum Nanostructures by Atomic Layer Deposition: From Surface Chemical Reactions to Applications
2个月前
已完结
Atomic layer growth of Pt films using dimethyl(N,N-dimethyl-3-butene-1-amine-N)platinum and O3
3个月前
已完结
High-quality SiNx thin-film growth at 300 °C using atomic layer deposition with hollow-cathode plasma
3个月前
已完结
Preparation of 100GHz DWDM filter by high power medium frequency pulse magnetron sputtering
4个月前
已完结
Effect of multi-cusp magnetic fields to generate a high-density hydrogen plasma inside a low pressure H2 cylindrical hollow cathode discharge
4个月前
已完结
皖公网安备34019202002308
