| 标题 |
Multipath-induced c-axis orientation of aluminum nitride films deposited using direct-current magnetron sputtering |
| 网址 | |
| DOI | |
| 其它 |
期刊:Materials Science in Semiconductor Processing 作者:Hai‐Liang Zhu; Jin Wu; Zhenhuai Yang; Kesheng Guo; Jing Liu; et al 出版日期:2025-01-19 |
| 求助人 | |
| 下载 | 求助已完成,仅限求助人或该文件上传人下载。 |
PDF的下载单位、IP信息已删除
(2025-6-4)