| 标题 |
Computational Fluid Dynamics Analysis of Particle Deposition Induced by a Showerhead Electrode in a Capacitively Coupled Plasma Reactor |
| 网址 | |
| DOI | |
| 其它 |
期刊:Coatings 作者:Ho Jun Kim; Jung Hwan Yoon 出版日期:2021-08-23 |
| 求助人 | |
| 下载 |
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(2025-6-4)