| 标题 |
Low temperature growth of stress-free single phase α -W films using HiPIMS with synchronized pulsed substrate bias |
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| DOI | |
| 其它 |
期刊:Journal of Applied Physics 作者:Tetsuhide Shimizu; Kazuki Takahashi; Robert Boyd; Rommel Paulo Viloan; Julien Keraudy; et al 出版日期:2021-04-20 |
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(2025-6-4)