| 标题 |
Influence of Deposition Temperature, Gas Pressure, Gas Phase Composition, and RF Frequency on Composition and Mechanical Stress of Plasma Silicon Nitride Layers |
| 网址 | |
| DOI | |
| 求助人 | |
| 下载 |
PDF的下载单位、IP信息已删除
(2025-6-4)