| 标题 |
 Wafer bow control of extended wavelength InGaAs photodetector materials by strain tailoring |
| 网址 | |
| DOI | |
| 其它 |
Materials Science in Semiconductor Processing(IF 5.2)Pub Date : 2025-05-22, DOI: 10.1016/j.mssp.2025.109698 Bowen Liu , Yi Gu , Lihao Yin , Huijuan Huang , Kang Li , Liuyan Fan , Hong Zhou , Pingping Chen , Chunlei Yu , Tao Li , Xiumei Shao , Xue Li , Haimei Gong |
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(2025-6-4)
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