| 标题 |
Development of a Wafer-Embeddable Microwave Patch Antenna Sensor for Plasma Diagnostics in Semiconductor Processing |
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| DOI | |
| 其它 |
期刊:IEEE Transactions on Instrumentation and Measurement 作者:Gwang-Seok Chae; Hee-Jung Yeom; Min-Young Yoon; Eun-Seok Choe; Wooram Kim; et al 出版日期:2026-01-01 |
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(2025-6-4)