| 标题 |
Optimization of high-quality gallium nitride thin films deposited on silicon substrates with an aluminum nitride buffer layer through radio-frequency magnetron sputtering |
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| DOI | |
| 其它 |
期刊:Vacuum 作者:Wei‐Sheng Liu; Sui-Hua Wu; G. Balaji; Licheng Huang; Chung-Kai Chi; et al 出版日期:2024-06-01 |
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(2025-6-4)