| 标题 |
Enhancing Ferroelectric Performance of Al 0.7 Sc 0.3 N Capacitors through Substrate Engineering |
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| 其它 |
期刊:2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) 作者:Yuan Fang; Haoji Qian; Xiaoxi Li; Jiawei Li; Cizhe Fang; et al 出版日期:2026-05-07 |
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(2025-6-4)