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A study of the phase transformation of low temperature deposited tantalum thin films using high power impulse magnetron sputtering and pulsed DC magnetron sputtering |
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期刊:Surface & Coatings Technology 作者:Wei-Chieh Chen; Zhaoying Wang; Chiao-Yi Yu; Bo-Huei Liao; Ming-Tzer Lin 出版日期:2022-02-28 |
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(2025-6-4)