| 标题 |
Recent research work on plasma immersion ion implantation of semiconductors |
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| DOI | |
| 其它 |
期刊:2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) 作者:P. Chu 出版日期:2001-10-22 |
| 求助人 | |
| 下载 |
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(2025-6-4)