Lv2
134 积分 2023-12-21 加入
Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII)
14小时前
待确认
Realization of ultrashallow junctions by plasma immersion ion implantation and laser annealing
14小时前
已完结
Ultra-Shallow Junctions Fabrication by Plasma Immersion Implantation on PULSION® Followed by Laser Thermal Processing
14小时前
已完结
Ultra-shallow junction formation on 3D silicon and germanium device structures by ion energy decoupled plasma doping
1天前
待确认
Down to 2 nm Ultra Shallow Junctions : Fabrication by IBS Plasma Immersion Ion Implantation Prototype PULSION®
1天前
待确认
Formation of 5 nm Ultra Shallow Junction on 3D Devices Structures by Ion Energy Decoupled Plasma Doping
1天前
待确认
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