| 标题 |
Optimizing Photoresist Strip to reduce fluorine outgassing causing bubble defect |
| 网址 | |
| DOI | |
| 其它 |
期刊: 作者:Yujie Xiao; Shuhong Sun; Ghit Guan Goh; Guanyu Zhou; Kim Foong Kong 出版日期:2022-05-02 |
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(2025-6-4)