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An optimized one-step wet etching process of Pb(Zr0.52Ti0.48)O3thin films for microelectromechanical system applications
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| 其它 |
CHE L, HALVORSEN E, CHEN X. An optimized one-step wet etching process of Pb(Zr0.52Ti0.48)O3thin films for microelectromechanical system applications [J]. Journal of Micromechanics and Microengineering, 2011, 21(10). |
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