| 标题 |
Effects of ultrasonic amplitude on sapphire ultrasonic vibration assisted chemical mechanical polishing by experimental and CFD method |
| 网址 | |
| DOI | |
| 其它 |
期刊:Mechanics of Advanced Materials and Structures 作者:Mufang Zhou; Min Zhong; Wenhu Xu 出版日期:2021-11-04 |
| 求助人 | |
| 下载 |
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(2025-6-4)