| 标题 |
Role of brush properties and pH on Cu ion-induced silica loading to polyvinyl acetal brushes during post-CMP cleaning |
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| DOI | |
| 其它 |
期刊:Applied Surface Science 作者:Sanjay Bisht; Maheepal Yadav; Se-Hoon Park; Hirokuni Hiyama; Tae-Gon Kim; et al 出版日期:2026-10-01 |
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(2025-6-4)