| 标题 |
Surface reaction of the hafnium precursor with a linked amido-cyclopentadienyl ligand: A density functional theory study |
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| DOI | |
| 其它 |
期刊:Journal of Vacuum Science and Technology 作者:Romel Hidayat; Hye-Lee Kim; Hohoon Kim; Y. Byun; Jongsoo Lee; et al 出版日期:2021-03-23 |
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(2025-6-4)