| 标题 |
Improvement of the crystalline quality of an yttria-stabilized zirconia film on silicon by a new deposition process in reactive sputtering |
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| 其它 |
期刊:Thin Solid Films 作者:S. Horita; T. Tajima; M. Murakawa; Takaharu Fujiyama; T. Hata 出版日期:1993-06-05 |
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(2025-6-4)