| 标题 |
Modelling of radiofrequency MEMS bulk acoustic wave resonators with Legendre polynomial method |
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| DOI | |
| 其它 |
期刊:The Journal of the Acoustical Society of America 作者:Antoine A. Raherison; Faniry Emilson F. Ratolojanahary; Jean-Etienne J. Lefebvre; Lahoucine L. Elmaimouni; Tadeusz T. Gryba 出版日期:2008-05-12 |
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(2025-6-4)