| 标题 |
A High-Performance Aluminum Nitride Piezoelectric MEMS Hydrophone With Island Piezo-Patterned Structure |
| 网址 | |
| DOI | |
| 其它 |
期刊:Journal of Microelectromechanical Systems 作者:Wenhao Li; Zhao Li; Yunchao Qi; Weiwei Cui; Hao Zhang 出版日期:2026-01-01 |
| 求助人 | |
| 下载 |
PDF的下载单位、IP信息已删除
(2025-6-4)