| 标题 |
Precise Control of Precursor Sticking Coefficient on Substrates With Large Aspect Ratios in ALD |
| 网址 | |
| DOI |
10.1115/imece2019-11152
doi
|
| 其它 |
期刊:Volume 12: Advanced Materials: Design, Processing, Characterization, and Applications 作者:T. J. Kunene; L. Tartibu; T. C. Jen 出版日期:2019-11-11 |
| 求助人 | |
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(2025-6-4)