| 标题 |
A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss |
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期刊:2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC) 作者:Ph. Helin; A. Firrincieli; A. Ray Chaudhuri; N. Pham; S. Lenci; et al 出版日期:2019-08-30 |
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(2025-6-4)