| 标题 |
Characterization of freestanding photoresist films for biological and MEMS applications |
| 网址 | |
| DOI | |
| 其它 |
期刊:Journal of Micromechanics and Microengineering 作者:D M Ornoff; Y Wang; N L Allbritton 出版日期:2012-12-21 |
| 求助人 | |
| 下载 |
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(2025-6-4)