| 标题 |
 MEMS microfluidic glucose sensor fabricated by laser direct writing and LOR lift-off 激光直写和LOR剥离制备MEMS微流体葡萄糖传感器
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| 网址 | |
| DOI |
10.1016/j.mee.2023.111789
doi
|
| 其它 |
谷歌关键词：Microelectron Eng LOR lift-off glucose laser 亮点：完整给出 LOR3A/S1813 双层剥离流程 + 微流控 SU-8 池 |
| 求助人 | |
| 下载 |
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