Zero-length conflat fin-type nonevaporable getter pump deposited with oxygen-free palladium/titanium

A zero-length conflat fin-type nonevaporable getter (NEG) pump deposited with oxygen-free palladium/titanium (Pd/Ti) has been developed. The NEG pump was activated by baking and its pumping speeds were measured as a function of baking time and baking temperature. The NEG pump can be fully activated by baking at 150 °C for 12 h and exhibits initial pumping speeds of 2340 L s−1 for H2, and 1440 L s−1 for CO. The initial pumping speeds of the oxygen-free Pd/Ti thin film after baking at 150 °C were estimated to be 3.2 L s−1 cm−2 for H2 and 7.6 L s−1 cm−2 for CO. The morphologies of oxygen-free Pd/Ti thin films on the partition plates and the bottom were examined by scanning electron microscopy, scanning transmission electron microscopy, and energy-dispersive X-ray spectroscopy. The Ti thin film was completely coated with Pd on the bottom, whereas the partition plates were covered by Pd/Ti nanostructures. The present NEG pump is ideal for maintaining ultrahigh vacuum below 10−8 Pa, because its pumping speeds for H2 and CO are quite large, and because it can be fully activated by baking at 150 °C for 12 h.