材料科学
压电
PMUT公司
电容式微机械超声换能器
传感器
超声波传感器
表面微加工
微电子机械系统
光电子学
复合材料
声学
制作
物理
医学
替代医学
病理
作者
Qifa Zhou,K. Kirk Shung,Q. Zhang,F. T. Djuth
摘要
Methods for fabricating high frequency ultrasound transducer and array based on piezoelectric films and MEMS technology are presented in this paper. Piezoelectric PZT films up to 30 μm-thick deposited on silicon substrate have been prepared by a modified sol-gel process. The raw materials included lead acetate trihydrate and zirconium n-propoxide and titanate isoproxide. The sol-gel PZT solutions were prepared using above materials and 2-methoxyethanol as the solvent. Spin-coated films were annealed at 750 oC by a rapid thermal annealing (RTA) process. Thicker PZT films were fabricated by repeating this process and using a modified PZT composite solution. The high frequency single element transducers actuated by the PZT films were fabricated and pulse-echo measurement results show the transducers had a broad bandwidth and high central frequencies. The beam profile of one 103 MHz transducer was measured using a 8 μm diameter wire and a lateral resolution of 33 μm was observed. A micromachined process to fabricate high frequency linear array will be also presented.
科研通智能强力驱动
Strongly Powered by AbleSci AI