Use of electronic speckle interferometry for recording nanodisplacements

Advancement of nanomechanics and nanotechnologies assumes creation of adequate tools for measuring displacements in the nanoscale range. In the present paper, for these purposes we propose to use the method and hardware of electronic speckle interferometry, which have several advantages over the other known measurement means. We present an idea based on which the method of electronic speckle interferometry, primarily designed to be used to measure displacements in the submicron range, can be used to measure displacements that are hundreds of times smaller, i.e., of the order of 1 nanometer. We consider the theoretical justification of this idea and the program algorithm for its implementation and describe the methods, the test specimens, and the results of experimental metrological test of the possibility of measuring displacements in the nanoscale range by using the existing model of the electronic speckle interferometer.