Oxide superconductor and magnetic metal thin film deposition by pulsed laser ablation: a review
作者
T. Jackson,S.B. Palmer
出处
期刊:Journal of Physics D [Institute of Physics] 日期:1994-08-14卷期号:27 (8): 1581-1594被引量:98
标识
DOI:10.1088/0022-3727/27/8/001
摘要
A practical review of the use of laser ablation for the deposition of thin films of oxide superconductors and metals is presented. Details of the design and operation of a laser ablation deposition system are discussed, together with the influence of operating parameters such as laser wavelength and power density on the film growth, with the aim of assisting the researcher beginning to use and/or study laser ablation deposition.