腔磁控管
材料科学
折射率
溅射沉积
沉积(地质)
基质(水族馆)
高功率脉冲磁控溅射
等离子体
光电子学
光学
溅射
薄膜
纳米技术
量子力学
生物
沉积物
海洋学
物理
地质学
古生物学
作者
O. D. Volpian,A I Kuzmichev,Yu. A. Obod
出处
期刊:Inorganic Materials: Applied Research
[Springer Nature]
日期:2015-06-17
被引量:3
标识
DOI:10.1134/s2075113315030132
摘要
Magnetron sputtering systems for the deposition of dielectric layers with a gradient variation in the refractive index are studied. A technology for the deposition of gradient coatings using a two-magnetron system operating in a mid-frequency pulsed ion sputtering mode is proposed. At a constant composition of the reaction gas medium and in an invariable magnetron operation mode, the required distribution profile of the refractive index is achieved owing to the substrate motion between magnetrons with targets made of different materials. The process is laser- and plasma-assisted and in situ optically controlled.
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