Electrical characterization of Au/Ni Schottky contacts on GaN synthesized using electrodeposition

Abstract Gallium nitride thin films have attracted attention due to their prospects in semiconductor devices and technology. In this study, we investigate the electrical properties and perform deep level transient spectroscopy (DLTS) on Au/Ni Schottky diodes fabricated on gallium nitride thin films that were synthesized by electrodeposition on a Si(111) substrate from a solution containing gallium nitrate (Ga(NO 3 ) 3 ) and ammonium nitrate (NH 4 (NO 3 )) using current densities of 1 and 3 mA cm −2 . The thin films were found to crystallize in the wurtzite hexagonal structure with crystallite sizes of approximately 20 nm. Scanning electron microscopy and atomic force microscopy were used to characterize the microstructure of the GaN thin films. The Schottky diodes had good rectifying properties, corresponding to n-type material. The diodes had a IV barrier heights of 0.76 eV and 0.60 eV; a CV barrier heights of 0.92 eV and 0.71 eV; and carrier densities of 1.2 × 10 16 cm −3 , and 1.7 × 10 16 cm −3 , for material deposited under 1 mA cm −2 and 3 mA cm −2 , respectively. By fitting a model taking both thermionic emission as well as conduction through the polycrystalline bulk into account, it was found that the grain boundary potential of the GaN crystallites was 0.29 V. The DLTS study revealed different dominant DLTS peaks in each as-grown sample with activation energies of 0.49 and 0.48 eV with capture cross-sections of 9 × 10 −15 and 4 × 10 −16 cm 2 , in the material grown under 1 mA cm −2 and 3 mA cm −2 current density, respectively. The defects seem to be similar to defects found in heavily damaged GaN and GaN grown on highly mismatched or cracked substrates, and are probably not simple defects.