Laser photonic-reduction stamping for graphene-based micro-supercapacitors ultrafast fabrication

Abstract Micro-supercapacitors are promising miniaturized energy storage devices that have attracted considerable research interest. However, their widespread use is limited by inefficient microfabrication technologies and their low energy density. Here, a flexible, designable micro-supercapacitor can be fabricated by a single pulse laser photonic-reduction stamping. A thousand spatially shaped laser pulses can be generated in one second, and over 30,000 micro-supercapacitors are produced within 10 minutes. The micro-supercapacitor and narrow gaps were dozens of microns and 500 nm, respectively. With the unique three-dimensional structure of laser-induced graphene based electrode, a single micro-supercapacitor exhibits an ultra-high energy density (0.23 Wh cm −3 ), an ultra-small time constant (0.01 ms), outstanding specific capacitance (128 mF cm −2 and 426.7 F cm −3 ) and a long-term cyclability. The unique technique is desirable for a broad range of applications, which surmounts current limitations of high-throughput fabrication and low energy density of micro-supercapacitors.