Improving the Fill Factor and F Number of Refractive Microlens Array by Reducing Developing Time

The fill factor and F number of refractive microlens array fabricated by melting photoresist are increased by reducing developing time.Because of the insufficiency of developing time,the bottoms of the protuberances are connected together so that the microlens are connected each other,and the fill factor is increased to 78.5%.On the other hand,because there is no bare glass substrate,the contact angle between the photoresist and the glass substrate is replaced by the one between the photoresist protuberance~·s bottoms and the photoresist substrate,so that the contact angle is reduced to 3.994° and the F number is increased to 11.357.The experimental results show that the methods of the paper are easy,practical and efficient.