Recent Progress in Silicon-based Waveguide Optical Switches and Switch Arrays

Optical switches are key components in optical network to implement optical exchanges.Silicon-based waveguide optical switches are important switch devices because of small bulk,fast switch speed,and good compatibility.Recent years,with the maturation of facture technology of silicon-based waveguides,the research on silicon-based waveguide optical switches and switch arrays has attracted more and more attentions.In this paper,the recent developments in optical switches and switch arrays based on three kinds of silicon-based waveguides,including SOI(silicon-on-insulater),polymer and SiO2,are reviewed.