Design and Fabrication of nanowire-grid polarizer in near-infrared broadband

The infrared polarizers are widely used in the infrared imaging systems as the core components, such as infrared stealth, target acquisition and mine detection, automobile night-vision instrument and other systems. For the requirements of near-infrared imaging systems, a nanowire-grid is designed by Finite Difference Time Domain (FDTD) method. Herein, considering the high reflection of metal aluminum in the manufacturing process, we propose a structure with aluminum-copper nanowire-grid. FDTD method is adapted to analyze the effects of the thickness of aluminumcopper in different combinations on the TM and TE polarization transmission efficiency as well as the extinction ratio when the grating's period is 300nm. Numerical results and theoretical analysis show that: the reflection on the substrate is suppressed with the optimal thickness of the Cu layer. Considering the resist-substrate reflectivity and the final performance of the polarizer, the structure with an 120nm Al layer, and a 50nm anti-reflection Cu layer is chosen; and the TM transmission efficiency is more than 71%, and the extinction ratio is more than 25dB. At last we used Holographic lithography and IBE to fabricate a prototype of the nanowire-grid.