石墨烯
化学气相沉积
材料科学
导电体
光电子学
等离子体
石墨烯纳米带
纳米技术
透明导电膜
等离子体增强化学气相沉积
电阻率和电导率
表面电导率
薄膜
电导率
复合材料
化学
工程类
电气工程
物理
物理化学
量子力学
作者
Jae‐Ho Kim,Masatou Ishihara,Yoshinori Koga,Kazuo Tsugawa,Masataka Hasegawa,Sumio Iijima
摘要
We present a low-temperature (300–400 °C), large-area (23 cm×20 cm) and efficient synthesis method for graphene-based transparent conductive films using surface wave plasma chemical vapor deposition. The films consist of few-layer graphene sheets. Their transparency and conductivity characteristics make them suitable for practical electrical and optoelectronic applications, which have been demonstrated by the proper operation of a touch panel fabricated using the films. The results confirm that our method could be suitable for the industrial mass production of macroscopic-scale graphene-based films.
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