石墨烯
化学气相沉积
材料科学
导电体
光电子学
等离子体
石墨烯纳米带
纳米技术
透明导电膜
等离子体增强化学气相沉积
电阻率和电导率
表面电导率
薄膜
电导率
复合材料
化学
工程类
物理化学
物理
电气工程
量子力学
作者
Jae-Ho Kim,Masatou Ishihara,Yoshinori Koga,Kazuo Tsugawa,Masataka Hasegawa,Sumio Iijima
摘要
We present a low-temperature (300–400 °C), large-area (23 cm×20 cm) and efficient synthesis method for graphene-based transparent conductive films using surface wave plasma chemical vapor deposition. The films consist of few-layer graphene sheets. Their transparency and conductivity characteristics make them suitable for practical electrical and optoelectronic applications, which have been demonstrated by the proper operation of a touch panel fabricated using the films. The results confirm that our method could be suitable for the industrial mass production of macroscopic-scale graphene-based films.
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