The Effect of Pile-Up and Contact Area on Hardness Test by Nanoindentation

We used atomic force microscopy (AFM) for the indentation test evaluating the indentation hardness of materials in the nanometer range. BK7, fused silica, and single-crystal silicon were used as test sample materials. The data analysis processes used to determine the contact area were important in evaluating the indentation hardness of the materials. The direct measurement of the size of the residual hardness impression was useful in evaluating the contact area even in the nanometer region. The results led us to conclude that AFM indentation using a sharp indenter is a powerful method for estimating the indentation hardness in the nanometer range.