Single layer and multilayer wear resistant coatings of (Ti,Al)N: a review

材料科学 磨料 物理气相沉积 涂层 冶金 图层(电子) 基质(水族馆) 机械加工 溅射 残余应力 复合材料 薄膜 纳米技术 海洋学 地质学
作者
S. PalDey,S.C. Deevi
出处
期刊:Materials Science and Engineering A-structural Materials Properties Microstructure and Processing [Elsevier BV]
卷期号:342 (1-2): 58-79 被引量:1313
标识
DOI:10.1016/s0921-5093(02)00259-9
摘要

We review the status of (Ti,Al)N based coatings obtained by various physical vapor deposition (PVD) techniques and compare their properties. PVD techniques based on sputtering and cathodic arc methods are widely used to deposit wear resistant (Ti,Al)N coatings. These techniques were further modified to improve the metal ionization rate and to eliminate macrodroplets from plasma streams. We summarize manufacture of target/cathode, substrate materials for deposition of coatings, deposition parameters, and the effect of deposition parameters on the physical and mechanical properties of (Ti,Al)N coatings. It is shown that (Ti,Al)N coatings by PVD enhance the wear, thermal, and oxidation resistance of a wide variety of tool materials. We discuss the wear resistant properties of (Ti,Al)N for various machining applications as compared with coatings such as TiN, Ti(C,N) and (Ti,Zr)N. High hardness (∼28–32 GPa), relatively low residual stress (∼5 GPa), superior oxidation resistance, high hot hardness, and low thermal conductivity make (Ti,Al)N coatings most desirable in dry machining and machining of abrasive alloys at high speeds. Multicomponent coatings based on different metallic and nonmetallic elements combine the benefit of individual components leading to a further refinement of coating properties. Alloying additions such as Cr and Y drastically improve the oxidation resistance, Zr and V improve the wear resistance, whereas, Si increases the hardness and resistance to chemical reactivity of the film. Addition of boron improves the abrasive wear behavior of Ti–Al based coatings due to the formation of TiB2 and BN phases depending on the deposition conditions. Hafnium based nitrides and carbides have potential for resistance to flank and crater wear. The presence of a large number of interfaces between individual layers of a multilayered structure results in a drastic increase in hardness and strength. (Ti,Al)N multilayer super lattice coatings with lattice periodicity of 5–10 nm allow creation of coatings with different properties than PVD deposited single layered thick coatings with columnar grain structure. A range of (Ti,Al)N based multilayers containing layers of (Ti,Al)CN, (Ti,Nb)N, TiN, AlN/TiN, CrN, Mo and WC are also reviewed. It is now possible to design new wear resistant or functional coatings based on a multilayer or a multicomponent system to meet the demanding applications of advanced materials.
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