A Single-Chip High-Speed Silicon Photonic Transmitter with Integrated Laser and Micro-Ring Modulator

We report a single-chip silicon photonic transmitter with an integrated laser and a high-speed micro-ring modulator. We demonstrate 128Gb/s NRZ and 256Gb/s PAM4 open eye diagrams with a signal-to-noise ratio (SNR) of 4.1 and transmitter penalty (TDECQ) of 1.5 dB, respectively, with <2.0Vpp drive voltage.