Micro-Jet Arrays for Cooling of Electronic Equipment

A high heat flux cooling system using an array of micro-jets is presented. The Micro-Jet Cooling Array (MJCA) is based on an array of small diameter micro-jets, with jet diameters as low as 300 microns. The return flow in MJCA is arranged so that the effect of neighboring jets is essentially eliminated and the high heat fluxes achievable in a single jet are reproduced over large areas. MJCA has been machined using the LIGA process and has been extensively tested. Extremely high heat fluxes have been achieved with MJCA, making is suitable for a variety of high heat flux applications.