量子传感器
微加工
钻石
材料科学
光电子学
磁场
电流传感器
灵敏度(控制系统)
电流(流体)
量子技术
量子
物理
电子工程
电气工程
工程类
医学
制作
病理
复合材料
开放量子系统
量子力学
替代医学
作者
Qihui Liu,Fei Xie,Peng Xiao,Yuqiang Hu,Nan Wang,Yonggui Zhang,Yang Wang,Lingyun Li,Hao Chen,Jiangong Cheng,Zhenyu Wu
标识
DOI:10.1002/qute.202300210
摘要
Abstract The negatively charged nitrogen vacancy (NV) color center in diamond is a type of point defect, which is extensively studied as a promising high‐sensitivity solid‐state magnetic field sensor. However, its transition from research to application is still limited due to the technical challenges of an integrated physical package. Here, an integrated diamond sensor is demonstrated with the essential component on the order of mm 3 , which is realized by a standard microfabrication process. A microfabrication‐compatible light guiding structure is constructed, providing photon detection efficiency of 66% and thus enabling a magnetic field detection sensitivity reaching 203 pT·Hz 1/2 . Incorporation of the sensor device with a magnetic yoke enables high‐precision wide‐range direct‐current sensing with current isolation. A current measuring range of 0–400 A with a minimum detection limit of 2 mA is achieved. By utilizing dual spin resonance modulation, the temperature drift is suppressed from 219 to 1.92 ppm∙°C −1 . This configuration provides new possibilities as a robust and scalable platform for current quantum sensing technologies.
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