光学
流离失所(心理学)
塔尔博特效应
振动
偏振器
材料科学
图像分辨率
物理
栅栏
声学
心理学
双折射
心理治疗师
作者
Chenguang Xin,Zhiyong Yang,Jie Qi,Qianqi Niu,xiaochen ma,Changjiang Fan,Mengwei Li
出处
期刊:Optics Express
[The Optical Society]
日期:2022-10-13
卷期号:30 (22): 40009-40009
被引量:1
摘要
Based on Talbot effect of optical microgratings, we report an ultra-compact sensor for displacement and vibration measurement with resolution down to sub-nanometer level. With no need of optical components such as reflectors, splitters, polarizers, and wave plates, the proposed sensor based on a common-path structure shows a high compactness. Using gratings with period of 3 µm, displacement measurement within a range of 1 mm is demonstrated experimentally. Associated with an interpolation circuit with subdividing factor of 4096, a resolution of 0.73 nm is obtained. The experimental results also show the ability for the sensor to detect in-plane vibration with frequency below 900 Hz. With a sub-nanometer resolution and an ultra-compact structure, the miniature sensor shows potential in applications such as high-precision machinery manufacturing and semiconductor processing.
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