A highly integrated three-axis vector diamond quantum magnetometer with a compact electrical package

Diamond nitrogen-vacancy (NV) center has been widely studied as a high-sensitivity solid-state quantum sensor with a wide range of applications, including magnetometry, thermometry manometry, and chemical sensing. However, its application in practical scenarios remains challenging due to difficulties of component manufacturing, miniaturization, and integration for NV control and readout. Here, we demonstrate an all-electric driving diamond sensor fabricated using standard microfabrication processes and micro-assembly, achieving integration of five key components—laser diode, diamond, microwave antenna, long pass filter, and photodiode in a hermetically sealed package case, with dimensions of 2.72 cm3. The integrated diamond magnetometer achieved a magnetic sensitivity of 2.25 nT · Hz−1/2. Additionally, the inherent crystallographic axes of the diamond are used to simultaneously detect vector magnetic field signals. The design and fabrication process allows for wafer-level assembly, enabling low-cost mass-production and easy integration with peripheral circuits.