3D silicon photonic-electronic integrated circuits for computing, networking, and imaging applications
作者
S. J. Ben Yoo
出处
期刊:2009 14th OptoElectronics and Communications Conference日期:2018-07-01卷期号:24: 1-2
标识
DOI:10.1109/oecc.2018.8729872
摘要
We discuss design, fabrication, and integration methods of 3D microsystems consisting of silicon photonic and electronic components integrated in 3D on a silicon substrate. Their unique advantages and functionalities for future computing, networking, and imaging applications will be discussed.